Via-first process for connecting a contact and a gate electrode

ABSTRACT

Various embodiments of the present disclosure provide a via-first process for connecting a contact to a gate electrode. In some embodiments, the contact is formed extending through a first interlayer dielectric (ILD) layer to a source/drain region bordering the gate electrode. An etch stop layer (ESL) is deposited covering the first ILD layer and the contact, and a second ILD layer is deposited covering the ESL. A first etch is performed into the first and second ILD layers and the etch stop layer to form a first opening exposing the gate electrode. A series of etches is performed into the second ILD layer and the etch stop layer to form a second opening overlying the contact and overlapping the first opening, such that a bottom of the second opening slants downward from the contact to the first opening. A gate-to-contact (GC) structure is formed filling the first and second openings.

REFERENCE TO RELATED APPLICATIONS

This application is a Divisional of U.S. application Ser. No.16/797,375, filed on Feb. 21, 2020, now allowed as U.S. Pat. No.11,189,525, the contents of which are hereby incorporated by referencein their entirety.

BACKGROUND

The integrated circuit (IC) manufacturing industry has experiencedexponential growth over the last few decades. As ICs have evolved,functional density (e.g., the number of interconnected devices per chiparea) has increased while feature sizes have decreased. One of thetechnologies being employed to continue the increase in functionaldensity is middle-of-the-line (MOL) processing. MOL processing isperformed between front-end-of-line (FEOL) processing andback-end-of-line (BEOL) processing and forms MOL interconnect structuresthat provide local routing between devices. The MOL interconnectstructures may be formed with high density and alleviate consumption ofscarce routing resources during BEOL processing.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIGS. 1A-1D illustrate cross-sectional views of various embodiments ofan integrated circuit (IC) comprising a gate-to-contact (GC) structure.

FIGS. 2A and 2B illustrate cross-sectional views of various embodimentsof the IC of FIG. 1A that are orthogonal to the cross-sectional view ofFIG. 1A

FIGS. 3A and 3B illustrate cross-sectional views of various alternativeembodiments of the IC of FIG. 1A in which the GC structure neighbors aplurality of semiconductor devices and a plurality of AR contacts.

FIGS. 4A and 4B illustrate expanded cross-sectional views of variousembodiments of the IC of FIG. 3A in which a back-end-of-line (BEOL)region overlies a middle-of-the-line (MOL) region in which the GCstructure is arranged.

FIGS. 5A-5D illustrate top layouts of various embodiments of the IC ofFIG. 3A.

FIGS. 6A and 6B illustrate top layouts of various embodiments of an ICcomprising a plurality of GC structures neighboring a plurality of ARcontacts and a plurality of semiconductor devices configured as finfield-effect transistors (finFETs).

FIG. 7 illustrates a cross-sectional view of some embodiments of the ICof FIG. 6A.

FIG. 8 illustrates a cross-sectional projection of some embodiments ofthe IC of FIG. 6A.

FIGS. 9-16, 17A, 17B, and 18A-18C illustrate a series of cross-sectionalviews of various embodiments of a method for forming an IC comprising aGC structure.

FIG. 19 illustrates a block diagram of some embodiments of the method ofFIGS. 9-16, 17A, 17B, and 18A-18C.

DETAILED DESCRIPTION

The present disclosure provides many different embodiments, or examples,for implementing different features of this disclosure. Specificexamples of components and arrangements are described below to simplifythe present disclosure. These are, of course, merely examples and arenot intended to be limiting. For example, the formation of a firstfeature over or on a second feature in the description that follows mayinclude embodiments in which the first and second features are formed indirect contact, and may also include embodiments in which additionalfeatures may be formed between the first and second features, such thatthe first and second features may not be in direct contact. In addition,the present disclosure may repeat reference numerals and/or letters inthe various examples. This repetition is for the purpose of simplicityand clarity and does not in itself dictate a relationship between thevarious embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly.

In some embodiments, an integrated circuit (IC) comprises amiddle-of-the-line (MOL) region in which an active region (AR) contactand a gate contact are arranged. The AR contact extends from the gatecontact to a source/drain region of a semiconductor device. The gatecontact overlies and directly contacts the AR contact and a gateelectrode of the semiconductor device. In some embodiments, a processfor forming the AR contact and the gate contact comprises: 1) depositingan interlayer dielectric (ILD) layer covering the semiconductor device;2) performing a first etch into the ILD layer to form an AR openingexposing the source/drain region; 3) performing a second etch into theILD layer to form a gate opening overlapping with the AR opening andexposing the gate electrode; 4) depositing a metal layer filling the ARopening and the gate opening; and 5) performing a planarization into themetal layer and the ILD layer until top surfaces thereof are about even.A portion of the metal layer in the AR opening defines the AR contact,and a portion of the metal layer in the gate opening defines the gatecontact.

A challenge with the process is that the source/drain region may beexposed in the AR opening during the second etch. This may lead to oxideforming on the source/drain region during the second etch. The oxidemay, in turn, increase a contact resistance between the AR contact andthe source/drain region and may hence shift operating parameters of theIC out of specification and/or lead to failure.

An additional challenge with the process is that the second etch processis subject to a large number of constraints regarding the gate opening.The gate opening has to overlap with the AR opening and the gateelectrode while remaining sufficiently spaced from other gate electrodesand other AR contacts. Therefore, the process depends upon a high degreeof overlay control and a high degree of dimension control. Failure toattain the high degrees of overlay and dimension control may lead tohigh leakage current and/or electrical shorting from the gate contact toanother gate electrode and/or another AR contact. Further, failure toattain the high degrees of overlay and dimension control may lead to thegate opening failing to overlap with the AR opening, whereby the gatecontact and the AR contact may fail to electrically couple to eachother. Further yet, failure to attain the high degrees of overlay anddimension control may lead to the gate opening failing to expose thegate electrode, whereby the gate contact and the gate electrode may failto electrically couple to each other.

Various embodiments of the present application are directed to avia-first process for electrically coupling an AR contact and a gateelectrode, as well as a gate-to-contact (GC) structure resulting fromthe via-first process. According to some embodiments of the via-firstprocess, the AR contact and the gate electrode are provided. The gateelectrode is part of a semiconductor device and overlies an AR of thesemiconductor device. The AR contact extends through a first ILD layeroverlying the semiconductor device to a source/drain region of thesemiconductor device or to some other location in the AR. An etch stoplayer (ESL) is deposited covering the first ILD layer, and a second ILDlayer is deposited covering the ESL. A first etch is performed into thefirst and second ILD layers and the ESL to form a first opening exposingthe gate electrode. A second etch is performed into the second ILDlayer, and stops on the ESL, to form a second opening overlying the ARcontact and overlapping with the first opening. A third etch isperformed into the ESL through the second opening to extend the secondopening to the AR contact and to slant a bottom of the second openingdownward from the AR contact to the first opening. A metal layer isdeposited filling the first and second openings, and a planarization isperformed into a top surface of the metal layer and a top surface of thesecond ILD layer until the top surfaces are about even. A portion of themetal layer in the first opening defines a gate via. A portion of themetal layer in the second opening defines a gate contact overlying thegate via. Collectively, the gate via and the gate contact define the GCstructure.

Because the AR contact is formed before the via-first process, the AR isnot exposed while forming the GC structure and is hence not subject tooxidation while forming the GC structure. Because the bottom of thesecond opening slants downward from the AR contact to the first opening,an aspect ratio (e.g., a ratio of height to width) of the first openingis low and the metal layer is deposited with less risk of seams andvoids forming in the first opening. Such seams and voids would increasethe resistance from the gate contact to the gate electrode and couldhence shift operating parameters out of specification and/or increasepower consumption.

Because the via-first process forms the gate contact on the gate via,overlay control and dimension control may be more relaxed compared to analternative process that forms the gate contact directly on the gateelectrode. Hence, a process window (e.g., a robustness) of the via-firstprocess may be larger compared to this alternative process. Landing thegate via on the gate electrode is more robust than landing the gatecontact directly on the gate electrode because the gate via may becentered over the gate electrode and may be smaller than the gatecontact. Landing the gate contact on the gate via is more robust thanlanding the gate contact on the gate electrode because the gate viavertically spaces the gate contact from other gate electrodes. As such,there is less of a risk of leakage current and/or electrically couplingwith the other gate electrodes. Further, the first opening provides abuffer to laterally space the second opening from another AR contact onan opposite side of the first opening as the AR contact. As such, thereis less of a risk of leakage current and/or electrically coupling withthe other AR contact.

With reference to FIG. 1A, a cross-sectional view 100A of someembodiments of an IC comprising a GC structure 102 is provided. The GCstructure 102 electrically couples a gate electrode 104 to an AR contact106 that neighbors the gate electrode 104. The AR contact 106 may, forexample, also be known as a metal-to-oxide diffusion (MD) contact or afirst level contact. The GC structure 102 and the AR contact 106 are ina MOL region 108 of the IC. The MOL region 108 provides local electricalrouting to alleviate consumption of electrical routing resources in aback-end-of-line (BEOL) region (not shown) of the IC that overlies theMOL region 108.

The GC structure 102 comprises a GC plug 110 and a GC barrier 112cupping an underside of the GC plug 110. The GC barrier 112 blocksmaterial from the GC plug 110 from diffusing out of the GC plug 110 tosurrounding structure and/or blocks material from surrounding structurefrom diffusing to the GC plug 110. In some embodiments, the GC barrier112 also serves as an adhesion layer for the GC plug 110. The GC barrier112 may be or comprise, for example, titanium, titanium nitride,tantalum nitride, tantalum, some other suitable barrier material(s), orany combination of the foregoing. The GC plug 110 may be or comprise,for example, cobalt, ruthenium, tungsten, some other suitable metal(s),or any combination of the foregoing.

In some embodiments, a thickness T_(b) of the GC barrier 112 is greaterat a bottom of the GC barrier 112 than at sidewalls of the GC barrier112. For example, the thickness T_(b) may be about 3-8 nanometers at thebottom and/or about 1-3 nanometers at the sidewalls. Other thicknessvalues are, however, amenable at the bottom of the GC barrier 112 and/orat the sidewalls of the GC barrier 112. If the thickness T_(b) is toosmall (e.g., less than about 1 nanometer or some other suitable value),the GC barrier 112 may be unable to effectively block material diffusionand/or the GC plug 110 may fail to adhere to the GC barrier 112. If thethickness T_(b) is too large (e.g., larger than about 8 nanometers orsome other suitable value), a resistance from the GC plug 110 to thegate electrode 104 may be high because the GC barrier 112 may have ahigher resistance than the GC plug 110. The high resistance may, inturn, shift operating parameters of the IC out of specification and/orlead to high power consumption.

The GC structure 102 defines a gate via 114 and a gate contact 116. Thegate contact 116 overlies the gate via 114 and the AR contact 106 andfurther extends laterally from the gate via 114 to the AR contact 106.The gate contact 116 may, for example, also be known as ametal-to-polysilicon (MP) contact or a second level contact. However,note that the gate electrode 104 is not limited to polysilicon and maybe or comprise metal and/or other suitable material(s). The gate via 114extends downward from the gate contact 116 to the gate electrode 104.

A bottom surface 102 b of the GC structure 102 slants downward from theAR contact 106 to the gate via 114 at an angle α relative to a sidewallof the GC structure 102 that is at the gate via 114. By forming the GCstructure 102 with the slanting, an opening within which the gate via114 is formed has a low aspect ratio (e.g., a low ratio of height towidth). If not for the slanting, the bottom surface 102 b of the GCstructure 102 may be substantially horizontal and the opening may have ahigh aspect ratio. The high aspect ratio may lead to clustering ofmaterial around a top corner in the opening while depositing layers fromwhich the GC structure 102 is formed. The clustering may pinch off a topof the opening before the opening is fully filled to form seams orvoids. Therefore, by forming the GC structure 102 with the slanting, thelikelihood of seams and voids at the gate via 114 is reduced. Such seamsand voids may increase the resistance from the gate contact 116 to thegate electrode 104 and may hence shift operating parameters of the ICout of specification and/or lead to high power consumption.

In some embodiments, the angle α is about 30-70 degrees, about 30-50degrees, about 50-70 degrees, or some other suitable value. If the angleα is too small (e.g., less than about 30 degrees or some other suitablevalue), the aspect ratio of the gate via 114 may be high. As such, thelikelihood of seems and voids at the gate via 114 may be high. If theangle α is too large (e.g., greater than about 70 degrees or some othersuitable value), the gate contact 116 may get too close to substrate118. This, in turn, may increase the likelihood of leakage currentand/or electrical shorting from the gate contact 116 to neighboringstructure (e.g., a neighboring gate electrode).

In embodiments, the angle α and the aspect ratio of the gate via 114depend upon a space S between the gate via 114 and the AR contact 106.For example, the angle α and the aspect ratio may increase as the spaceS decreases. In some embodiments, the space S is about 9-18 nanometers,about 9.0-13.5 nanometers, about 13.5-18.0 nanometers, or some othersuitable value. If the space S is too small (e.g., less than about 9nanometers or some other suitable value), the angle α may be large andthe aspect ratio of the gate via 114 may be high. As such, thelikelihood of seems and voids at the gate via 114 may be high. Atemerging and future process nodes, the space S may, for example, belimited by feature density, such that the space S may, for example, beless than about 18 nanometers or some other suitable value. In someembodiments, the space S is about 9-18 nanometers and the angle α isabout 45-60 degrees. Other values for the space S and the angle α are,however, amenable.

In some embodiments, the gate via 114 has a width W_(gv) of about 8-25nanometers, about 8.0-16.5 nanometers, about 16.5-25.0 nanometers, orsome other suitable value. If the width W_(gv) is too small (e.g., lessthan about 8 nanometers or some other suitable value), the gate via 114may have a high aspect ratio and may hence be prone to seams and voids.Additionally, formation of the gate via 114 may be challenging due tothe small size. If the width W_(gv) is too large (e.g., greater thanabout 25 nanometers or some other suitable value), there is a high riskthat the gate via 114 may get too close to a neighboring AR contact (notshown). This, in turn, may lead to leakage current and/or electricallycoupling with the neighboring AR contact.

The gate electrode 104 is spaced over a substrate 118 by a gatedielectric layer 120 and borders a source/drain region 122. Thesubstrate 118 may be, for example, a bulk silicon substrate, asilicon-on-insulator (SOI) substrate, or some other suitablesemiconductor substrate. The gate dielectric layer 120 may be orcomprise, for example, silicon oxide, a high k dielectric, some othersuitable dielectric material(s), or any combination of the foregoing.The gate electrode 104 may be or comprise, for example, dopedpolysilicon, metal, some other suitable conductive material(s), or anycombination of the foregoing.

The source/drain region 122 is at an opposite end of a channel region118 c as another source/drain region (not shown). The channel region 118c underlies the gate electrode 104 in the substrate 118 and isconfigured change between a conductive state and a non-conductive statedepending upon a bias voltage applied to the gate electrode 104. Thesource/drain region 122 may be or comprise, for example, a dopedsemiconductor region of the substrate 118 and/or an epitaxial layergrown on the substrate 118. In some embodiments, the substrate 118 ismonocrystalline silicon and the source/drain region 122 is silicongermanium or silicon carbide. Other materials are, however, amenable.The source/drain region 122, the channel region 118 c, the gateelectrode 104, and the gate dielectric layer 120 partially define asemiconductor device 124. The semiconductor device 124 may, for example,be a field-effect transistor (FET), some other suitable transistor, amemory cell, or some other suitable semiconductor device.

The AR contact 106 extends from the GC structure 102 to the source/drainregion 122, and the AR contact 106 and the GC structure 102 collectivelydefine a composite conductive structure electrically coupling the gateelectrode 104 to the source/drain region 122. In alternativeembodiments, the AR contact 106 extends to a body contact region (notshown) of the semiconductor device 124 or to some other location in anactive region 126 of the semiconductor device 124. The active region 126is a semiconductor region upon which the semiconductor device 124 isformed and is at least partially defined by the source/drain region 122and a top portion of the substrate 118 underlying the gate electrode104. In some embodiments, the active region 126 further comprises thebody contact region. In some embodiments, the active region 126 isdemarcated by a shallow trench isolation (STI) structure (not shown)and/or some other suitable trench isolation structure. The active region126 may, for example, also be known as an oxide diffusion (OD) regionand/or a device region. The AR contact 106 comprises an AR plug 128 andan AR barrier 130 cupping an underside of the AR plug 128.

The AR barrier 130 blocks material from the AR plug 128 from diffusingout of the AR plug 128 to surrounding structure and/or blocks materialfrom surrounding structure from diffusing to the AR plug 128. In someembodiments, the AR barrier 130 also serves as an adhesion layer for theAR plug 128. The AR barrier 130 may be or comprise, for example,titanium, titanium nitride, tantalum nitride, some other suitablebarrier material(s), or any combination of the foregoing. The AR plug128 may be or comprise, for example, cobalt, ruthenium, tungsten, someother suitable metal(s), or any combination of the foregoing. In someembodiments, the AR plug 128 and the GC plug 110 are or comprise thesame material and/or define a composite plug. In some embodiments, theAR barrier 130 and the GC barrier 112 are or comprise the same materialand/or define a composite barrier layer extending in a closed patharound the AR plug 128.

A pair of interlayer dielectric (ILD) layers 132 and an etch stop layer134 are stacked over the substrate 118 and accommodate the AR contact106 and the GC structure 102. The etch stop layer 134 separates the ILDlayers 132 from each other and is about level with a bottom of the gatecontact 116. The ILD layers 132 may be or comprise, for example, siliconoxide, silicon nitride, a low k dielectric, some other suitabledielectric(s), or any combination of the foregoing. The etch stop layer134 may be or comprise, for example, silicon nitride, silicon carbide,some other suitable dielectric(s), or any combination of the foregoing.

As seen hereafter, the etch stop layer 134 provides control over thevertical separation from the gate contact 116 to the gate electrode 104and also to neighboring gate electrodes (not shown). Further, as seenhereafter, the GC structure 102 is formed after the AR contact 106. Assuch, the opening within which the AR contact 106 is formed is filledduring formation of the GC structure 102 and the source/drain region 122is not exposed through the opening during formation of the GC structure102. This, in turn, reduces the likelihood of oxide forming on thesource/drain region 122 and increasing the resistance from the ARcontact 106 to the source/drain region 122. Such increased resistancecould shift operating parameters of the IC out of specification, reduceyields, increase power consumption, and so on.

Further yet, as seen hereafter, forming the gate contact 116 spaced overand electrically coupled to the gate electrode 104 by the gate via 114has a larger process window (e.g., is more robust) than omitting thegate via 114 and forming the gate contact 116 directly on the gateelectrode 104. Forming the gate contact 116 directly on the gateelectrode 104 comprises landing the gate contact 116 on both the gateelectrode 104 and the AR contact 106 while remaining sufficiently spacedfrom neighboring structure to avoid leakage current and/or electricalcoupling. Such neighboring structure may include, for example,neighboring gate electrodes (not shown) and neighboring AR contacts (notshown). As such, landing the gate contact 116 directly on the gateelectrode 104 is subject to a large number of overlay and/or dimensionconstraints. Further, because of the large size of the gate contact 116,the constraints are fairly stringent to avoid leakage current and/orelectrical coupling to the neighboring structure.

In contrast, forming the gate contact 116 spaced over and electricallycoupled to the gate electrode 104 by the gate via 114 comprises landinga gate via 114 on the gate electrode 104 and landing the gate contact116 on the gate via 114. Landing the gate via 114 on the gate electrode104 is subject to fewer constraints than landing the gate contact 116 onthe gate electrode 104. The gate via 114 does not land on the AR contact106, so the gate via 114 may be centered over the gate electrode 104.Further, the gate via 114 is smaller than the gate contact 116, so thereis less risk of the gate via 114 getting too close to neighboringstructure and causing leakage current and/or electrical coupling. Assuch, overlay and/or dimension constraints may be less stringent.

Landing the gate contact 116 on the gate via 114 is also subject to lessstringent overlay and/or dimension constraints than landing the gatecontact 116 on the gate electrode 104. The gate contact 116 isvertically offset from the gate electrode 104 and neighboring gateelectrodes (not shown), so there is less risk of leakage current and/orelectrical coupling from the gate contact 116 to the neighboring gateelectrodes (not shown). Further, a via opening within which the gate via114 is formed provides a buffer laterally between a neighboring ARcontact (not shown) and a contact opening within which the gate contact116 is formed. The buffer reduces the likelihood of the contact opening,and hence the gate contact 116, getting too close to the neighboring ARcontact. This, in turn, reduces the likelihood of leakage current and/orelectrical coupling from the gate contact 116 to the neighboring ARcontact.

With reference to FIG. 1B, a cross-sectional view 100B of somealternative embodiments of the IC of FIG. 1A is provided in which the GCbarrier 112 is omitted. As such, the GC structure 102 and the GC plug110 are one and the same. Because the GC barrier 112 may, for example,have a higher resistance than the GC plug 110, omitting the GC barrier112 may reduce a resistance from the gate contact 116 to the gateelectrode 104. This may reduce power consumption and/or improveperformance of the semiconductor device 124. The GC structure 102 andthe GC plug 110 may, for example, be or comprise tungsten, ruthenium,cobalt, some other suitable conductive material(s), or any combinationof the foregoing. In some embodiments, the GC structure 102 is orconsists essentially of a single material throughout an entirety of theGC structure 102. In some embodiments, GC plug 110 and the AR plug 128are the same material. In alternative embodiments, the GC plug 110 andthe AR plug 128 are different materials.

With reference to FIG. 1C, a cross-sectional view 100C of somealternative embodiments of the IC of FIG. 1A is provided in which thegate via 114 and the gate contact 116 (collectively, the GC structure102) share a plug 136 and a barrier 138 with the AR contact 106. Theplug 136 may, for example, be as the GC plug 110 of FIG. 1A and/or theAR plug 128 of FIG. 1A is/are described. Further, the plug 136 may be orcomprise, for example, cobalt, ruthenium, tungsten, some other suitablemetal(s), or any combination of the foregoing. The barrier 138 may, forexample, be as the GC barrier 112 of FIG. 1A and/or the AR barrier 130of FIG. 1A is/are described. Further, the barrier 138 may be orcomprise, for example, titanium, titanium nitride, tantalum nitride,tantalum, some other suitable barrier material(s), or any combination ofthe foregoing.

With reference to FIG. 1D, a cross-sectional view 100D of somealternative embodiments of the IC of FIG. 1A is provided in which thebarrier 138 is omitted. As discussed with regard to FIG. 1B, omittingthe barrier 138 may reduce resistance from the gate contact 116 to thegate electrode 104.

With reference to FIG. 2A, a cross-sectional view 200A of someembodiments of the IC of FIG. 1A is provided in which the semiconductordevice 124 is a planar FET. The cross-sectional view 200A of FIG. 2A isorthogonal to the cross-sectional view 100A of FIG. 1A, and thecross-sectional view 100A of FIG. 1A may, for example, be taken alongline A-A′ in FIG. 2A. Hence, the cross-sectional view 100A of FIG. 1Aextends into and out of the page.

The gate electrode 104 and the gate dielectric layer 120 havesubstantially planar profiles and partially overlie a trench isolationstructure 202. The trench isolation structure 202 has a pair of segmentsrespectively on opposite sides of the channel region 118 c anddemarcates the active region 126 of the semiconductor device 124. Thetrench isolation structure 202 may, for example, be or comprise siliconoxide and/or some other suitable dielectric material(s). Further, thetrench isolation structure 202 may, for example, be or comprise a STIstructure or some other suitable trench isolation structure.

With reference to FIG. 2B, a cross-sectional view 200B of somealternative embodiments of the IC of FIG. 2A is provided in which thesemiconductor device 124 is a fin FET (finFET). Similar to FIG. 2A, thecross-sectional view 100A of FIG. 1A may, for example, be taken alongline A-A′ in FIG. 2B. The gate electrode 104 and the gate dielectriclayer 120 wrap around a top of a fin 118 f of the substrate 118. The fin118 f protrudes upward and has a top surface elevated above a topsurface of the trench isolation structure 202. Further, the fin 118 f atleast partially defines the active region 126 of the semiconductordevice 124.

While the semiconductor device 124 is illustrated as a planar FET and afinFET respectively in FIGS. 2A and 2B, the semiconductor device 124 maybe some other suitable type of transistor or semiconductor device.Hence, the GC structure 102 is not limited to use with the embodimentsof the semiconductor device 124 illustrated in FIGS. 2A and 2B. Forexample, the semiconductor device 124 may be a gate-all-around (GAA) FETor some other suitable transistor. The GAA FET may, for example, employround/square nano wires, horizontal nano slabs, horizontal nanosheets,hexagonal nano wires, nano rings, or some other suitable nano structuresfor individual channel regions. Additionally, while FIGS. 2A and 2B aredescribed with regard to FIG. 1A, the teachings in FIGS. 2A and 2B areapplicable to any one of FIGS. 1B-1D. For example, FIG. 1C mayalternatively be taken along line A-A′ in FIGS. 2A and 2B. As anotherexample, the GC barrier 112 may be omitted in alternative embodiments ofFIGS. 2A and 2B and any one of FIGS. 1B and 1D may be taken along lineA-A′ in these alternative embodiments.

With reference to FIG. 3A, a cross-sectional view 300A of somealternative embodiments of the IC of FIG. 1A is provided in which the GCstructure 102 neighbors a plurality of semiconductor devices 124 and aplurality of AR contacts 106. The semiconductor devices 124 and the ARcontacts 106 are as their counterparts are described in FIG. 1A. Forexample, the semiconductor devices 124 each comprise a gate electrode104, a gate dielectric layer 120, etc. As another example, the ARcontacts 106 each comprise an AR plug 128 and an AR barrier 130.Further, the semiconductor devices 124 share source/drain regions 122.In alternative embodiments, at least one of the semiconductor devices124 has an individual source/drain region.

The GC structure 102 overlies a first gate electrode 104 a and isseparated from a second gate electrode 104 b by a distance D₁. Becausethe gate contact 116 is elevated above the second gate electrode 104 bby the gate via 114, the distance D₁ is larger than it would be if thegate contact 116 was directly on the first gate electrode 104 a. Assuch, the likelihood of leakage current and/or electrical coupling fromthe gate contact 116 to the second gate electrode 104 b is low.

In some embodiments, the distance D₁ is about 5-25 nanometers, about5-15 nanometers, about 15-25 nanometers, about 10-25 nanometers, greaterthan about 10 nanometers, or some other suitable value. If the distanceD₁ is too small (e.g., less than about 5 nanometers or some othersuitable value), leakage current may be high from the gate contact 116to the second gate electrode 104 b and/or the likelihood of electricalcoupling from the gate contact 116 to the second gate electrode 104 bmay be high. If the distance D₁ is too large (e.g., greater than about25 nanometers or some other suitable value), an aspect ratio of the gatevia 114 may be high. As discussed above with regard to FIG. 1A, a highaspect ratio at the gate via 114 increases the likelihood of seams orvoids forming at the gate via 114. Such seams and voids would increasethe resistance from the gate contact 116 to the first gate electrode 104a and could hence shift operating parameters of the IC out ofspecification and/or increase power consumption.

With continued reference to FIG. 3A, inner sidewall spacers 302 are onsidewalls of the gate electrodes 104 and outer sidewall spacers 304 areon sidewalls of the inner sidewall spacers 302. Further, silicide layers306 separate the AR contacts 106 from the source/drain regions 122 andsource/drain extensions 122 e protrude outward from the source/drainregions 122. In alternative embodiments, the source/drain extensions 122e are omitted. The source/drain extensions 122 e underlie the outersidewall spacers 304 and may, for example, have a lesser dopingconcentration than a remainder of the source/drain regions 122. Theinner and outer sidewall spacers 302, 304 may, for example, be orcomprise silicon oxide, silicon nitride, silicon carbide, siliconoxynitride, some other suitable dielectric(s), or any combination of theforegoing. In some embodiments, the inner and outer sidewall spacers302, 304 are different materials. In other embodiments, the inner andouter sidewall spacers 302, 304 are the same material.

With reference to FIG. 3B, a cross-sectional view 300B of somealternative embodiments of the IC of FIG. 3A is provided in which the GCstructure 102 is configured as in FIG. 1B and the GC barrier 112 isomitted. In yet other alternative embodiments of the IC of FIG. 3A, theGC structure 102 and/or the AR contacts 106 is/are as in any one ofFIGS. 1C and 1D.

With reference to FIG. 4A, a cross-sectional view 400A of someembodiments of the IC of FIG. 3A is provided in which a BEOL region 402overlies and is electrically coupled to the MOL region 108. The BEOLregion 402 is partially shown and includes a plurality of interconnectwires 404 and a plurality of interconnect vias 406 in a plurality ofadditional ILD layers 408 and a plurality of additional etch stop layers410.

The plurality of interconnect wires 404 are grouped into a plurality ofwire levels above the substrate 118, and the plurality of interconnectvias 406 are grouped into a plurality of via levels above the substrate118. The plurality of wire levels and the plurality of via levels arealternatingly stacked to define conductive paths leading from the MOLregion 108. Further, the plurality of wire levels includes a first wirelevel M₁ and a second wire level M₂, and the plurality of via levelsincludes a zeroth via level V₀ and a first via level V₁. In someembodiments, one or more additional wire level(s) (not shown) and/or oneor more additional via level(s) overlie and electrically couple to thesecond wire level M₂.

With reference to FIG. 4B, a cross-sectional view 400B of somealternative embodiments of the IC of FIG. 4A is provided in which the GCstructure 102 is electrically isolated from the BEOL region 402. Inother words, the GC structure 102 is completely spaced from interconnectvias in the zeroth via level V₀. In some embodiments, a top surface ofthe GC structure 102 directly contacts a corresponding one of theadditional etch stop layers 410 across an entirety of the top surface.

The embodiments of FIG. 4B may, for example, arise when the GC structure102 is used for static random-access memory (SRAM) or the like, whereasthe embodiments of FIG. 4A may, for example, arise when the GC structure102 is used for logic or the like. Further, the GC structure 102 and/orthe AR contacts 106 may, for example, be as in any one of FIGS. 1B-1D inalternative embodiments of FIGS. 4A and 4B.

With reference to FIG. 5A, a top layout 500A of some embodiments of theIC of FIG. 3A is provided. The IC of FIG. 3A may, for example, be takenalong line B-B′ in FIG. 5A. The GC structure 102 has rounded edges and,as described hereafter, is formed from the overlay between a contactpattern 502 and a via pattern 504. The contact pattern 502 is used toform the gate contact 116 and is elongated along line B-B′. The viapattern 504 is used to form the gate via 114 and is circular. Othershapes for the contact pattern 502 and/or the via pattern 504 are,however, amenable. The contact pattern 502 and the via pattern 504overlap by a distance D₂ and the contact pattern 502 is separated from afirst AR contact 106 a by a distance D₃.

In some embodiments, the distance D₂ is about 5-25 nanometers, about5-15 nanometers, about 15-25 nanometers, about 3-25 nanometers, greaterthan about 3 nanometers, or some other suitable value. If the distanceD₂ is too small (e.g., less than about 3 nanometers or some othersuitable value), electrical coupling between the gate contact 116 andthe gate via 114 may be poor and/or otherwise fail. Such poor electricalcoupling may, for example, limit the amount of current that may passfrom the gate contact 116 to the gate via 114 and/or shift operatingparameters of the IC out of specification. If the distance D₂ is toolarge (e.g., greater than about 25 nanometers or some other suitablevalue), the contact pattern 502 may extend beyond the via pattern 504and the distance D₃ may be too small (see below).

In some embodiments, the distance D₃ is about 5-25 nanometers, about5-15 nanometers, about 15-25 nanometers, about 3-25 nanometers, greaterthan about 3 nanometers, or some other suitable value. If the distanceD₃ is too small (e.g., less than about 3 nanometers or some othersuitable value), leakage current may be high between the gate contact116 and the first AR contact 106 a and/or the gate contact 116 and thefirst AR contact 106 a may electrically couple. If the distance D₃ istoo large (e.g., greater than about 25 nanometers or some other suitablevalue), device scaling may be needlessly hindered and/or the distance D₂may be too small.

Because of the gate via 114, the risk of the distance D₂ and the risk ofthe distance D₃ being too small and/or too large are reduced. Duringformation of the GC structure 102, a via opening with the via pattern504 is first formed and then a contact opening with the contact pattern502 is formed overlapping with the via opening. Hence, the via pattern504 provides a buffer laterally between the contact pattern 502 and thefirst AR contact 106 a. The buffer reduces the likelihood of the contactpattern 502 getting too close to the first AR contact 106 a (see, e.g.,the distance D₃). As such, the likelihood of leakage current and/orelectrical shorting is reduced. Further, the buffer allows the contactpattern 502 to get closer to the first AR contact 106 a than wouldotherwise be possible. As such, overlay between the contact pattern 502and the via pattern 504 (see, e.g., the distance D₂) is robust (e.g.,has a large overlay window).

With reference to FIGS. 5B and 5C, top layouts 500B and 500C of somealternative embodiments of the IC of FIG. 5A are provided in which edgesof the GC structure 102 are substantially square. Further, the contactpattern 502 and the via pattern 504 are rectangular or square shaped. Asbetween the top layouts 500B and 500C of FIGS. 5B and 5C, widths of theAR contacts 106 are less than widths of the gate electrodes 104 in FIG.5B and are greater than the widths of the gate electrodes 104 in FIG.5C.

With reference to Fig. FIG. 5D, a top layout 500D of some alternativeembodiments of the IC of FIG. 5A is provided in which the GC structure102 is at an angle 1. The angle Φ is relative to a reference axis 506,which is perpendicular to a direction along which the gate electrodes104 and the AR contacts 106 are elongated. The angle Φ may, for example,be less than about 30 degrees, less than about 20 degrees, less thanabout 10 degrees, or some other angle.

In some embodiments, by orienting the GC structure 102 at the angle 1,the contact pattern 502 may extend a greater distance over the second ARcontact 106 b, along its central axis 508, without getting too close tothe second gate electrode 104 b. For example, a distance D_(Φ) along thecentral axis 508 may be equal to a distance D₀ along the reference axis506 divided by COS(Φ) (e.g., D_(Φ)=D₀/COSΦ), such that D_(Φ) may greaterthan D₀. Because the contact pattern 502 may extend a greater distanceover the second AR contact 106 b, the likelihood of landing the contactpattern 502 and hence the gate contact 116 on the second AR contact 106b may be increased. In some embodiments, by orienting the GC structure102 at the angle 1, the likelihood of landing the contact pattern 502and hence of the gate contact 116 on the gate via 114 may be increased.This may, for example, be for the same reasons described above.

Notwithstanding the specific shapes illustrated for the GC structure102, the contact pattern 502, and the via pattern 504 in FIGS. 5A-5D,other shapes are amenable in alternative embodiments. Further, the GCstructure 102 and/or the AR contacts 106 may, for example, be as in anyone of FIGS. 1B-1D in alternative embodiments of FIGS. 5A-5D. Forexample, the GC barrier 112 may be omitted in alternative embodiments ofFIGS. 5A-5D.

With reference to FIG. 6A, a top layout 600A of some embodiments of anIC comprising a plurality of GC structures 102 is provided in which theGC structures 102 are on a plurality of AR contacts 106 and a pluralityof semiconductor devices 124 configured as finFETs. The GC structures102, the AR contacts 106, and the semiconductor devices 124 may, forexample, be as their counterparts are described in any one orcombination of FIGS. 1A-1D, 2B, 3A, 3B, 4A, 4B, and 5A-5D. In someembodiments, any of FIGS. 1A-1D, 3A, 3B, 4A, and 4B is taken along lineC and/or FIG. 2B is taken along line D.

A plurality of a fins 118 f is defined by a substrate (see, e.g., 118 inFIG. 2B), and the fins 118 f are elongated in parallel in a firstdirection. A plurality of gate electrodes 104 and the plurality of ARcontacts 106 are elongated in parallel in a second direction orthogonalto the first direction. The first and second directions may, forexample, respectively be an X direction and a Y direction or vice versa.The gate electrodes 104 respectively overlie (when viewed in crosssection) and straddle the fins 118 f. Similarly, the AR contacts 106respectively overlie (when viewed in cross section) and straddle thefins 118 f at source/drain regions (not shown; see, e.g., 122 in FIG.1A) on and/or partially defined by the fins 118 f. In alternativeembodiments, at least one of the AR contacts 106 is at another location(e.g., other than a source/drain region) in an active region for acorresponding one of the semiconductor devices 124.

The fins 118 f and the gate electrodes 104 partially define thesemiconductor devices 124. The GC structures 102 are on thesemiconductor devices 124 and extend from corresponding gate electrodes104 to corresponding AR contacts 106 to provide electrically couplingtherebetween. The GC structures 102 comprise corresponding gate vias 114and corresponding gate contacts 116. The gate vias 114 verticallyseparate the gate contacts 116 from the gate electrodes 104. Asdescribed above, the gate vias 114 allow the GC structures 102 to bemore robustly formed and reduce leakage current.

With continued reference to FIG. 6A, a plurality of AR vias 602 is onsome of the AR contacts 106. Further, a plurality of additional gatevias 114 is separate from the GC structures 102 and is on the gateelectrodes 104. In some embodiments, the AR vias 602 are a singlematerial throughout, whereas the additional gate vias 114 comprisemultiple materials. For example, the AR vias 602 may lack a barrier,whereas the additional gate vias 114 may comprise corresponding barriersand corresponding plugs. See, e.g., 110 and 112 in FIG. 1A.

With reference to FIG. 6B, a top layout 600B of some alternativeembodiments of the IC of FIG. 6A is provided in which the GC structures102 are orientated at an angle 1. The angle Φ is relative to a referenceaxis, which is parallel to a direction along which the fins 118 f areelongated and/or is perpendicular to a direction along which the gateelectrodes 104 and the AR contacts 106 are elongated. As described andexplained with regard to FIG. 5D, the angle Φ may, for example, increasethe likelihood of landing the gate contacts 116 on corresponding ARcontacts 106 and/or corresponding gate vias 114. In other words, angle Φmay, for example, increase the landing window for the gate contact 116.

With reference to FIG. 7 , a cross-sectional view 700 of someembodiments of the IC of FIG. 6A is provided along line C in FIG. 6A.Semiconductor devices 124 are on a fin 118 f of a substrate 118 andcomprise corresponding gate electrodes 104, corresponding high kdielectric layers 706, and corresponding gate dielectric layers 120.Note that the high k dielectric layers 706 may also be construed as gatedielectric layers. The gate electrodes 104 comprise corresponding metalplugs 702 and corresponding work function layers 704 cupping undersidesof the metal plugs 702. The high k dielectric layers 706 cup undersidesof the work function layers 704 and separate the work function layers704 from the gate dielectric layers 120.

A GC structure 102 is on a corresponding one of the semiconductordevices 124 and a corresponding one of the AR contacts 106. The GCstructure 102 comprises a GC plug 110 and a GC barrier 112 cupping anunderside of the GC plug 110. In alternative embodiments, the GC barrier112 is omitted as in FIG. 1B. The corresponding one of the AR contacts106 extends from the GC structure 102 to a silicide layer 306 on asource/drain region 122. Another one of the AR contacts 106 is to aright side of the GC structure 102 and extends below a top surface ofthe fin 118 f to a trench isolation structure 202. A cap layer 710covers the semiconductor devices 124 between the gate electrodes 104 anda neighboring one of the ILD layers 132. The cap layer 710 may be orcomprise, for example, silicon nitride and/or some other suitabledielectric(s).

With reference to FIG. 8 , a cross-sectional projection 800 of someembodiments of the IC of FIG. 6A is provided within box E of FIG. 6A.The cross-sectional projection 800 is a projection of the portion ofFIG. 6A within box E onto a two-dimensional (2D) plane in the directionshown by the arrows on box E. As such, the cross-sectional projection800 is similar to the cross-sectional view 700 of FIG. 7 , except thatit shows the overlap between features within different cross-sectionalplanes. For example, an AR via 602 is shown bordering the GC structure102 on a corresponding one of the AR contacts 106 even though the AR via602 and the GC structure 102 may be in different cross-sectional planes.As another example, the gate electrodes 104 are shown extending below atop surface of the fin 118 f in the same cross-sectional plane as the GCstructure 102 even though this extension may be in a differentcross-sectional plane.

With reference to FIGS. 9-16, 17A, and 17B, a series of cross-sectionalviews 900-1600, 1700A, and 1700B of some embodiments of a method forforming an IC comprising a GC structure is provided. The cross-sectionalviews 900-1600, 1700A, and 1700B correspond to the cross-sectional view300A of FIG. 3A and therefore illustrate formation of the IC and the GCstructure 102 in FIG. 3A. However, the method illustrated by thecross-sectional views 900-1600, 1700A, and 1700B may also be employed toform the IC and/or the GC structure 102 in any of FIGS. 1A, 2A, 2B, 4A,4B, 5A-5D, 6A, 6B, 7, and 8 .

As illustrated by the cross-sectional view 900 of FIG. 9 , a pluralityof semiconductor devices 124 is provided or otherwise formed over asubstrate 118. The semiconductor devices 124 comprise corresponding gateelectrodes 104 and corresponding gate dielectric layers 120 separatingthe gate electrodes 104 from the substrate 118. Further, thesemiconductor devices 124 share corresponding source/drain regions 122laterally between the gate electrodes 104. In alternative embodiments,at least one of the semiconductor devices 124 has an individualsource/drain region. The source/drain regions 122 may, for example, bedoped regions of the substrate 118 and/or epitaxial layers formed sunkeninto a top of the substrate 118. The source/drain regions 122 and topportions of the substrate 118 underlying the semiconductor devices 124at least partially define an active region 126.

In some embodiments, the semiconductor devices 124 are planar FETsand/or each have the same cross-sectional profile as their counterpartin FIG. 2A. For example, a cross-sectional profile of a semiconductordevice taken along line F-F′ may be as its counterpart in FIG. 2A. Inalternative embodiments, the semiconductor devices 124 are finFETsand/or each have the same cross-sectional profile as their counterpartin FIG. 2B. For example, a cross-sectional profile of a semiconductordevices taken along line F-F′ may be as its counterpart in FIG. 2B. Inyet other alternative embodiments, the semiconductor devices 124 are GAAtransistors, some other suitable transistors, memory cells, or someother suitable semiconductor devices.

Also illustrated by the cross-sectional view 900 of FIG. 9 , a pluralityof inner sidewall spacers 302 and a plurality of outer sidewall spacers304 are formed. The inner sidewall spacers 302 are respectively formedon sidewalls of the gate electrodes 104. The outer sidewall spacers 304are respectively formed on sidewalls of the inner sidewall spacers 302and are respectively formed overlying the source/drain regions 122.

As illustrated by the cross-sectional view 1000 of FIG. 10 , a first ILDlayer 132 a is formed over the semiconductor devices 124 and thesubstrate 118. Further, the first ILD layer 132 a is formed with a topsurface that is flat or substantially flat. A process for forming thefirst ILD layer 132 a may, for example, comprise depositing the firstILD layer 132 a and subsequently performing a planarization into the topsurface the first ILD layer 132 a. Other processes are, however,amenable. The planarization may, for example, be or comprise a chemicalmechanical polish (CMP) and/or some other suitable planarizationprocess.

As illustrated by the cross-sectional view 1100 of FIG. 11 , a firstetch is performed into the first ILD layer 132 a to form a plurality ofAR openings 1102. The AR openings 1102 expose at least some of thesource/drain regions 122 and/or some other suitable location(s) in theactive region 126. In some embodiments, the AR openings 1102 have toplayouts that are laterally elongated and/or that overlie multiple finsof finFETs. A non-limiting example of such top layouts may, for example,be found through reference to the AR contacts 106 in FIG. 6A and/or FIG.6B. In alternative embodiments, the AR openings 1102 have top layoutsthat are circular, square, or some other suitable shape. A process forperforming the first etch may, for example, comprise forming a firstmask 1104 on the first ILD layer 132 a, etching the first ILD layer 132a with the first mask 1104 in place, and removing the first mask 1104.Other processes are, however, amenable. The first mask 1104 may, forexample, be photoresist and/or some other suitable mask material(s).

As illustrated by the cross-sectional view 1200 of FIG. 12 , silicidelayers 306 are formed on the active region 126 at bottoms of the ARopenings 1102 (see, e.g., FIG. 11 ). For example, the silicide layers306 may be formed on source/drain regions 122 in the AR openings 1102.The silicide layers 306 are or comprise a metal silicide. The silicidelayers 306 may, for example, be formed by a salicide process or someother suitable process for forming metal silicide.

Also illustrated by the cross-sectional view 1200 of FIG. 12 , ARcontacts 106 are formed filling the AR openings 1102 (see, e.g., FIG. 11) over the silicide layers 306. The AR contacts 106 comprisecorresponding AR plugs 128 and corresponding AR barriers 130 cuppingundersides of the AR plugs 128. A process for forming the AR contacts106 may, for example, comprise: 1) depositing a barrier layer thatcovers the first ILD layer 132 a and that lines and partially fills theAR openings 1102; 2) depositing a plug layer covering the barrier layerand filling a remainder of the AR openings 1102; and 3) performing aplanarization into the barrier layer, the plug layer, and the first ILDlayer 132 a until top surfaces thereof are about even. Other processesfor forming the AR contacts 106 are, however, amenable. Theplanarization thins the first ILD layer 132 a to a thickness T_(ild) andseparates the plug and barrier layers respectively into the AR plugs 128and the AR barriers 130. Further, the planarization may, for example, beor comprise a CMP and/or some other suitable planarization process.

In some embodiments, the thickness T_(ild) of the first ILD layer 132 ais about 8-25 nanometers, about 8-16.5 nanometers, about 16.5-25nanometers, or some other suitable value directly over the gateelectrodes 104. If the thickness T_(ild) is too small (e.g., less thanabout 8 nanometers or some other suitable value), the likelihood of asubsequently formed gate contact getting too close to a neighboring gateelectrode becomes high. This, in turn, increases the likelihood ofleakage current and/or electrical shorting that may lead to devicefailure. If the thickness T_(ild) is too large (e.g., greater than about25 nanometers), material is wasted.

As illustrated by the cross-sectional view 1300 of FIG. 13 , an etchstop layer 134 and a second ILD layer 132 b are deposited over the firstILD layer 132 a and the AR contacts 106. The etch stop layer 134separates the first and second ILD layers 132 a, 132 b from each otherand, as seen hereafter, serves as an etch stop while forming a gatecontact to provide control over the vertical separation between the gatecontact and the gate electrodes 104.

As illustrated by the cross-sectional view 1400 of FIG. 14 , a secondetch is performed into the first and second ILD layers 132 a, 132 b andthe etch stop layer 134 to form a via opening 1402 exposing a first gateelectrode 104 a. The via opening 1402 may, for example, have a toplayout as shown for the gate via(s) 114 in FIGS. 5A-5D, 6A, and 6Band/or as shown for the via pattern 504 in FIGS. 5A-5D. Other toplayouts are, however, amenable.

In some embodiments, the via opening 1402 has a width W_(gv) of about8-25 nanometers, about 8.0-16.5 nanometers, about 16.5-25.0 nanometers,or some other suitable value. If the width W_(gv) is too small (e.g.,less than about 8 nanometers or some other suitable value), the viaopening 1402 may have a high aspect ratio and hence a gate viasubsequently formed in the via opening 1402 may be prone to form withseams and voids. Additionally, formation of the via opening 1402 may bechallenging due to the small size. If the width W_(gv) is too large(e.g., greater than about 25 nanometers or some other suitable value),there is a high risk that the via opening 1402 may get too close to afirst AR contact 106 a to a right side of the via opening 1402. Hence,the gate via may have high leakage current and/or electrically shortwith the first AR contact 106 a.

A process for performing the second etch may, for example, compriseforming a second mask 1404 on the second ILD layer 132 b, etching thefirst and second ILD layers 132 a, 132 b and the etch stop layer 134with the second mask 1404 in place, and removing the second mask 1404.Other processes are, however, amenable. The second mask 1404 may, forexample, be photoresist and/or some other suitable mask material(s).

As illustrated by the cross-sectional view 1500 of FIG. 15 , a thirdetch is performed into the second ILD layers 132 b to form a contactopening 1502. The contact opening 1502 overlies a second AR contact 106b to a left side of the via opening 1402. Further, the contact opening1502 overlaps with the via opening 1402 by a distance D₂ and islaterally separated by a distance D₃ from the first AR contact 106 a.The contact opening 1502 may, for example, have a top layout as shownfor the contact pattern 502 in FIGS. 5A-5D. Other top layouts are,however, amenable.

In some embodiments, the distance D₂ is about 5-25 nanometers, about5-15 nanometers, about 15-25 nanometers, about 3-25 nanometers, greaterthan about 3 nanometers, or some other suitable value. If the distanceD₂ is too small (e.g., less than about 3 nanometers or some othersuitable value), electrical coupling between a gate contact and a gatevia subsequently formed in the contact opening 1502 and the via opening1402 may be poor and/or otherwise fail. If the distance D₂ is too large(e.g., greater than about 25 nanometers or some other suitable value),the contact opening 1502 may extend beyond the via opening 1402. This,in turn, increases the risk of the distance D₃ being too small (seebelow).

In some embodiments, the distance D₃ is about 5-25 nanometers, about5-15 nanometers, about 15-25 nanometers, about 3-25 nanometers, greaterthan about 3 nanometers, or some other suitable value. If the distanceD₃ is too small (e.g., less than about 3 nanometers or some othersuitable value), leakage current may be high between a gate contactsubsequently formed in the contact opening 1502 and the first AR contact106 a and/or the gate contact and the first AR contact 106 a mayelectrically couple. If the distance D₃ is too large (e.g., greater thanabout 25 nanometers or some other suitable value), device scaling may beneedlessly hindered and/or the distance D₂ may be too small.

Because of the via opening 1402, the risk of the distance D₂ and therisk of the distance D₃ being too small and/or too large are reduced.The via opening 1402 provides a buffer laterally between the contactopening 1502 and the first AR contact 106 a. The buffer reduces thelikelihood of the contact opening 1502 getting too close to the first ARcontact 106 a (see, e.g., the distance D₃). As such, the likelihood ofleakage current and/or electrical shorting is reduced. Further, thebuffer allows the contact opening 1502 to get closer to the first ARcontact 106 a than would otherwise be possible. As such, overlay betweenthe contact opening 1502 and the via opening 1402 (see, e.g., thedistance D₂) is robust (e.g., has a large process window).

A process for performing the third etch may, for example, compriseforming a third mask 1504 on the second ILD layer 132 b, etching thesecond ILD layers 132 b with the third mask 1504 in place, and removingthe third mask 1504. Other processes are, however, amenable. In someembodiments, the third mask 1504 is photoresist and/or some othersuitable mask material(s). In some embodiments, the third mask 1504partially fills the via opening 1402 to protect the first gate electrode104 a in the via opening 1402 and/or to protect the width W_(gv) of thevia opening 1402. In some embodiments, the etch stop layer 134 serves asan etch stop for the etching, such that the etching stops on the etchstop layer 134. In some embodiments, over etching occurs during theetching and the contact opening 1502 extends into the etch stop layer134.

In some embodiments, the etching is performed by a dry etch to achievehigh selectivity between the second ILD layer 132 b and the etch stoplayer 134 and to minimize over etching. In some embodiments, the dryetch forms plasma from an etch gas being or comprisinghexafluoro-1,3-butadiene gas (e.g., C₄F₆) to achieve high selectivity.Other etch gases are, however, amenable. In some embodiments in whichthe etch gas is or comprises hexafluoro-1,3-butadiene gas, the secondILD layer 132 b is or comprises silicon oxide and the etch stop layer134 is or comprises silicon nitride. Other materials for the second ILDlayer 132 b and the etch stop layer 134 are, however, amenable and/orother etch gas(es) are, however, amenable. In alternative embodiments,the etching is performed by a wet etch and/or some other suitable etchprocess. However, the wet etch may be unable to achieve high selectivitybetween the second ILD layer 132 b and the etch stop layer 134.

As illustrated by the cross-sectional view of 1600 of FIG. 16 , a fourthetch is performed into the etch stop layer 134 to extend the contactopening 1502 to the second AR contact 106 b and to recess a bottomsurface of the contact opening 1502 by a distance D₄. Additionally, thefourth etch erodes a corner 1602 (shown in phantom) at a boundarybetween the via and contact openings 1402, 1502 so the bottom surfaceslants downward from the second AR contact 106 b to the via opening1402. The bottom surface is at an angle α relative to a sidewall of thevia opening 1402, and the bottom surface and the sidewall are defined bythe first ILD layer 132 a.

By forming the contact opening 1502 so the bottom surface slantsdownward, the via opening 1402 and hence a gate via subsequently formedin the via opening 1402 have low aspect ratios (e.g., low ratios ofheight to width). The low aspect ratio of the via opening 1402 preventsclustering of material around the corner 1602 while depositing materialfrom which the gate via is formed. The clustering may, in turn, pinchoff a top of the via opening 1402 before the via opening 1402 is fullyfilled to form seams or voids. Such seams and voids could increase aresistance of the gate via and/or could shift operating parameters outof specification. Therefore, by forming the contact opening 1502 so thebottom surface slants downward, the likelihood of seams and voids at thevia opening 1402 and hence at the gate via is reduced.

In some embodiments, the angle α is about 30-70 degrees, about 30-50degrees, about 50-70 degrees, or some other suitable value. If the angleα is too small (e.g., less than about 30 degrees or some other suitablevalue), the aspect ratio of the via opening 1402 may be high. As such,the likelihood of seems and voids at a gate via subsequently formed inthe via opening 1402 may be high. If the angle α is too large (e.g.,greater than about 70 degrees or some other suitable value), overetching of the first ILD layer 132 a may occur and a distance D₁ fromthe contact opening 1502 to a second gate electrode 104 b may become toosmall. If the distance D₁ is too small, leakage current and/orelectrically shorting may occur from the second gate electrode 104 b toa gate contact subsequently formed in the contact opening 1502.

In some embodiments, the angle α and the aspect ratio of the gateopening 1402 depend upon a space S between the via opening 1402 and thesecond AR contact 106 b. For example, the angle α and the aspect ratiomay increase as the space S decreases. In some embodiments, the space Sis about 9-18 nanometers, about 9.0-13.5 nanometers, about 13.5-18.0nanometers, or some other suitable value. If the space S is too small(e.g., less than about 9 nanometers or some other suitable value), theangle α may be large and the aspect ratio may be high. As such, thelikelihood of seems and voids at the gate via 114 may be high. Atemerging and future process nodes, the space S may, for example, belimited by feature density, such that the space S may, for example, beless than about 18 nanometers or some other suitable value. In someembodiments, the space S is about 9-18 nanometers and the angle α isabout 45-60 degrees. Other values for the space S and the angle α are,however, amenable.

In some embodiments, the distance D₄ is less than about 10 nanometers orsome other suitable value. If the distance D₄ is too large (e.g.,greater than about 10 nanometers or some other suitable value), thedistance D₁ from the contact opening 1502 to the second gate electrode104 b may become too small. In some embodiments, the distance D₁ isabout 5-25 nanometers, about 5-15 nanometers, about 15-25 nanometers,about 10-25 nanometers, greater than about 10 nanometers, or some othersuitable value. If the distance D₁ is too small (e.g., less than about 5nanometers or some other suitable value), leakage current and/orelectrically shorting may occur from the second gate electrode 104 b toa gate contact subsequently formed in the contact opening 1502. If thedistance D₁ is too large (e.g., greater than about 25 nanometers or someother suitable value), an aspect ratio of the via opening 1402 may behigh. As discussed above, this increases the likelihood of seams orvoids forming at the via opening 1402.

A process for performing the fourth etch may, for example, compriseetching the etch stop layer 134 and subsequently cleaning etch residue.Other processes are, however, amenable. For example, the cleaning may beomitted. In some embodiments, the third etch (see, e.g., FIG. 15 ) andthe fourth etch are performed in situ within a common etch processchamber, such that the substrate 118 is in the common etch processchamber continuously from a beginning of the third etch to an end of thefourth etch. In alternative embodiments, the fourth etch is performed ina different etch process chamber than the third etch. In someembodiments, the first ILD layer 132 a serves as an etch stop for theetching of the fourth etch, such that the etching stops on the first ILDlayer 132 a. In some embodiments, over etching occurs during theetching, such that the contact opening 1502 extends into the first ILDlayer 132 a.

In some embodiments, the etching is performed by a dry etch. The dryetch allows high selectivity between the etch stop layer 134 and thefirst ILD layer 132 a so as to minimize over etching and so as to keepthe distance D₁ large. Further, the dry etch provides physicalbombardment by ions that erode the corner 1602 and slant the bottomsurface of the contact opening 1502. As noted above, the slantingprevents voids and seams from forming at the via opening 1402. In someembodiments, the dry etch forms plasma from an etch gas being orcomprising tetrafluoromethane gas (e.g., CF₄) and/or hydrogen gas (e.g.,H₂). Other etch gases are, however, amenable. In some embodiments inwhich the etch gas comprises tetrafluoromethane gas and hydrogen gas, aratio of the hydrogen gas to the tetrafluoromethane gas is greater thanabout 10. For example, a flow rate of the hydrogen gas into a processchamber within which the dry etch is performed may be about 10 timesgreater than that for the tetrafluoromethane gas. In some embodiments inwhich the etch gas comprises tetrafluoromethane gas and hydrogen gas,the etch stop layer 134 is or comprises silicon nitride and the firstILD layer 132 a is or comprises silicon oxide. Other materials and gasesare, however, amenable. In alternative embodiments, the etching isperformed by a wet etch and/or some other suitable etch process.However, the wet etch may be unable to achieve high selectivity betweenthe etch stop layer 134 and the first ILD layer 132 a and hence overetching may be high. This increases the likelihood of the distance D₁getting too small (as discussed above).

In some embodiments, the cleaning is performed by or comprises plasmatreatment of exposed surfaces in the via and contact openings 1402, 1502using hydrogen gas (e.g., H₂) and/or nitrogen gas (e.g., N₂). Othergases and/or other cleaning processes are, however, amenable. The plasmatreatment bombards the corner 1602 with ions and erodes the corner 1602to further slant the bottom of the contact opening 1502. As noted above,the slanting prevents voids and seams from forming at the via opening1402. In some embodiments, the cleaning erodes the corner 1602 by agreater extent than the etching and/or the cleaning and the etching arerespectively performed by a dry etch and a plasma treatment process.

As illustrated by the cross-sectional view 1700A of FIG. 17A, a barrierlayer 1702 is deposited covering the second ILD layer 132 b and isfurther deposited lining and partially filling the contact opening 1502(see, e.g., FIG. 16 ) and the via opening 1402 (see, e.g., FIG. 16 ).Further, a plug layer 1704 is deposited covering the barrier layer 1702and filling a remainder of the contact opening 1502 and the via opening1402. The barrier layer 1702 blocks material from diffusing through thebarrier layer 1702 from the plug layer 1704 and/or through the barrierlayer 1702 to the plug layer 1704. Further, in some embodiments, thebarrier layer 1702 serves as an adhesion layer for the plug layer 1704.The barrier layer 1702 may be or comprise, for example, titanium,titanium nitride, tantalum nitride, some other suitable barriermaterial, or any combination of the foregoing. The plug layer 1704 maybe or comprise, for example, cobalt, ruthenium, tungsten, some othersuitable metal, or any combination of the foregoing.

In some embodiments, a thickness T_(b) of the barrier layer 1702 isgreater at a bottom of the barrier layer 1702 than at sidewalls of thebarrier layer 1702. For example, the thickness T_(b) may be about 3-8nanometers at the bottom and/or about 1-3 nanometers at the sidewalls.Other thickness values are, however, amenable. If the thickness T_(b) istoo small (e.g., less than about 1 nanometer or some other suitablevalue), the barrier layer 1702 may be unable to effectively blockmaterial diffusion and/or the plug layer 1704 may be unable to adhere tothe barrier layer 1702. If the thickness T_(b) is too large (e.g.,larger than about 8 nanometers or some other suitable value), aresistance from the plug layer 1704 to the first gate electrode 104 amay be high because the barrier layer 1702 may have a high resistancerelative to the plug layer 1704. The high resistance may, for example,shift operating of the IC out of specification.

The deposition of the barrier layer 1702 may, for example, be orcomprise chemical vapor deposition (CVD), physical vapor deposition(PVD), some other suitable deposition process, or any combination of theforegoing. The deposition of the plug layer 1704 may, for example, be orcomprise CVD, PVD, electroless plating, electroplating, some othersuitable deposition process, or any combination of the foregoing.

As illustrated by the cross-sectional view 1700B of FIG. 17B, aplanarization is performed into the barrier layer 1702 (see, e.g., FIG.17A), the plug layer 1704 (see, e.g., FIG. 17A), and the second ILDlayer 132 b until top surfaces thereof are about even. The planarizationmay, for example, be or comprise a CMP and/or some other suitableplanarization process. The planarization forms a GC structure 102 in thecontact opening 1502 (see, e.g., FIG. 16 ) and the via opening 1402(see, e.g., FIG. 16 ).

The GC structure 102 electrically couples the first gate electrode 104 ato the second AR contact 106 b. The GC structure 102 comprises a GC plug110 and a GC barrier 112 respectively formed from the plug layer 1704and the barrier layer 1702. The GC barrier 112 cups an underside of theGC plug 110 and separates the GC plug 110 from the first gate electrode104 a and the second AR contact 106 b. Further, the GC structure 102defines a gate via 114 and a gate contact 116. A bottom surface of theGC structure 102 slants downward from the second AR contact 106 b to thegate via 114. As discussed above, the slanting decreases an aspect ratioof the gate via 114 and hence reduces the likelihood of seams and/orvoids. The seams and/or voids would increase a resistance from the gatecontact 116 to the first gate electrode 104 a and could therefore shiftoperating parameters of the IC out of specification.

As seen in the preceding figures (see, e.g., FIGS. 14-16, 17A, and 17B),the GC structure 102 is formed after the AR contacts 106. Because the GCstructure 102 is formed after the AR contacts 106, the AR openings 1102(see, e.g., FIG. 11 ) within which the AR contacts 106 are formed arefilled during formation of the GC structure 102. Further, thesource/drain regions 122 and/or other portions of the active region 126in the AR openings 1102 are not exposed through the AR openings 1102during formation of the GC structure 102. This, in turn, preventsoxidation of the source/drain regions and/or the active region 126during formation of the GC structure 102. Such oxidation would increaseresistance from the AR contacts 106 to the active region 126. Suchincreased resistance could, in turn, shift operating parameters of theIC out of specification, reduce yields, increase power consumption, andso on.

Also, as seen in the preceding figures (see, e.g., FIGS. 14-16, 17A, and17B), the gate contact 116 is formed spaced over and electricallycoupled to the first gate electrode 104 a by the gate via 114. Formingthe gate contact 116 as such has a larger process window (e.g., is morerobust) than omitting the gate via 114 and forming the gate contact 116directly on the first gate electrode 104 a. Forming the gate contact 116directly on the gate electrode 104 comprises landing the contact opening1502 (see, e.g., FIG. 16 ) on both the first gate electrode 104 a andthe second AR contact 106 b while remaining sufficiently spaced from thesecond gate electrode 104 b and the first AR contact 106 a to avoidleakage current and/or electrical coupling. As such, landing the contactopening 1502 directly on the gate electrode 104 is subject to a largenumber of overlay and/or dimension constraints. Further, because of thelarge size of the contact opening 1502, the constraints are fairlystringent to avoid leakage current and/or electrical coupling.

In contrast, forming the gate contact 116 spaced over and electricallycoupled to the gate electrode 104 by the gate via 114 comprises landingthe via opening 1402 (see, e.g., FIG. 16 ) on the gate electrode 104 andlanding the contact opening 1502 on the via opening 1402. These twolandings individually and collectively have larger process windows(e.g., are more robust) than landing the contact opening 1502 on thefirst gate electrode 104 a. Landing the via opening 1402 on the firstgate electrode 104 a is subject to fewer constraints than landing thecontact opening 1502 on the first gate electrode 104 a. The via opening1402 does not land on the second AR contact 106 b, so the via opening1402 may be centered over the first gate electrode 104 a. Further, thevia opening 1402 is smaller than the contact opening 1502, so there isless risk of the via opening 1402 getting too close to the first ARcontact 106 a and causing leakage current and/or electrical shorting. Assuch, overlay and/or dimension constraints may be less stringent.

Landing the contact opening 1502 on the via opening 1402 is subject toless stringent constraints than landing the contact opening 1502 on thefirst gate electrode 104 a. The contact opening 1502 is verticallyoffset from the second gate electrode 104 b, such that there is less ofa risk of the contact opening 1502 getting too close to the second gateelectrode 104 b and causing leakage current and/or electrical shorting.Further, the via opening 1402 provides a buffer laterally between thecontact opening 1502 and the first AR contact 106 a. The buffer reducesthe likelihood of the contact opening 1502 getting too close to first ARcontact 106 a and causing leakage current and/or electrical shortingwith the first AR contact 106 a.

After forming the GC structure 102 at FIG. 17B, a BEOL region (notshown) may be formed over the GC structure 102 and the second ILD layer132 b. For examples of such a BEOL region, see the BEOL region 402 inFIGS. 4A and 4B.

While FIGS. 17A and 17B illustrate formation of the GC structure 102with the GC barrier 112, the GC barrier 112 may be omitted inalternative embodiments. In some embodiments in which the GC barrier 112is omitted, the barrier layer 1702 is omitted at FIG. 17A. The acts atFIG. 17B then proceed as described above without the barrier layer 1702.In alternative embodiments in which the GC barrier 112 is omitted, theacts at FIGS. 18A-18C (described hereafter) are performed in place ofthe acts at FIGS. 17A and 17B. In other words, the method proceeds fromFIGS. 9-16 to FIGS. 18A-18C while skipping FIGS. 17A and 17B.

With reference to FIGS. 18A-18C, a series of cross-sectional views1800A-1800C of some alternative embodiments of the series ofcross-sectional views 1700A and 1700B of FIGS. 17A and 17B is provided.The cross-sectional views 18A-18C correspond to the cross-sectional view300B of FIG. 3B and therefore illustrate formation of the IC and the GCstructure 102 in FIG. 3B. However, the method illustrated by thecross-sectional views 1800A-1800C may also be employed to form the ICand/or the GC structure 102 in any of FIGS. 1B, 2A, 2B, 6A, and 6B.

As illustrated by the cross-sectional view 1800A of FIG. 18A, a first ICregion I and a second IC region II are formed. The first IC region I,less a first plug layer 1802, is formed according to the acts describedand illustrated at FIGS. 9-16 . Similarly, the second IC region II isformed according to the acts described at FIGS. 9-16 . However, thesecond IC region II is not illustrated in FIGS. 9-16 . The second ICregion II comprises a peripheral opening 1804 in the second ILD layer132 b and the etch stop layer 134. Further, in some embodiments, theperipheral opening 1804 extends into the first ILD layer 132 a due toover etching. The peripheral opening 1804 may, for example, be formedwith the contact opening 1502 at FIGS. 15 and 16 .

Also illustrated by the cross-sectional view 1800A of FIG. 18A, thefirst plug layer 1802 is grown from seed material in the contact opening1502 (see, e.g., FIG. 16 ) and the via opening 1402 (see, e.g., FIG. 16). The first plug layer 1802 grows filling the contact opening 1502 andthe via opening 1402 because the second AR contact 106 b and/or thefirst gate electrode 104 a serve as seed material. However, the firstplug layer 1802 does not grow filling the peripheral opening 1804because the peripheral opening 1804 is devoid of seed material.

In some embodiments, the seed material from which the first plug layer1802 grows is metal and/or the peripheral opening 1804 is devoid ofmetal. In some embodiments, the first gate electrode 104 a and thesecond AR contact 106 b have different seed materials and/or thedifferent seed materials lead to different growth rates respectively atthe first gate electrode 104 a and the second AR contact 106 b. In someembodiments, the first plug layer 1802 has different thicknessesrespectively overlying the first gate electrode 104 a and the second ARcontact 106 b due to the different growth rates. The second AR contact106 b and/or the first gate electrode 104 a may be or comprise, forexample, tungsten and/or cobalt, whereas the first plug layer 1802 maybe or comprise, for example, tungsten. Other materials are, however,amenable. Further, the first plug layer 1802 may be or comprise, forexample, cobalt, ruthenium, tungsten, some other suitable metal, or anycombination of the foregoing.

The first plug layer 1802 may, for example, be grown by CVD, electrolessplating, electroplating, or some other suitable growth process. In someembodiments, the first plug layer 1802 is or comprises tungsten and/oris grown by CVD using tungsten fluoride (e.g., WF6) and hydrogen (e.g.,H₂) precursors. Other materials, growth processes, and precursors are,however, amenable for the first plug layer 1802.

As illustrated by the cross-sectional view 1800B of FIG. 18B, a barrierlayer 1806 is deposited covering the first plug layer 1802 and thesecond ILD layer 132 b. Further, the barrier layer 1806 is depositedpartially filling and lining the peripheral opening 1804 (see, e.g.,FIG. 18A). The barrier layer 1806 may be or comprise, for example,titanium, titanium nitride, tantalum nitride, some other suitablebarrier material, or any combination of the foregoing. The deposition ofthe barrier layer 1806 may, for example, be or comprise CVD, PVD, someother suitable deposition process, or any combination of the foregoing.

Also illustrated by the cross-sectional view 1800B of FIG. 18B, a secondplug layer 1808 is deposited covering the barrier layer 1806 and fillinga remainder of the peripheral opening 1804. The barrier layer 1806blocks material from diffusing through the barrier layer 1806 from thesecond plug layer 1808 and/or through the barrier layer 1806 to thesecond plug layer 1808. Further, in some embodiments, the barrier layer1806 serves as an adhesion layer for the second plug layer 1808. Thesecond plug layer 1808 may be or comprise, for example, cobalt,ruthenium, tungsten, some other suitable metal, or any combination ofthe foregoing. The deposition of the second plug layer 1808 may, forexample, be or comprise CVD, PVD, electroless plating, electroplating,some other suitable deposition process, or any combination of theforegoing.

As illustrated by the cross-sectional view 1800C of FIG. 18C, aplanarization is performed into the first and second plug layers 1802,1808, the barrier layer 1806, and the second ILD layer 132 b until topsurfaces thereof are about even. The planarization may, for example, beor comprise a CMP and/or some other suitable planarization process. Theplanarization forms a GC structure 102 in the contact opening 1502 (see,e.g., FIG. 16 ) and the via opening 1402 (see, e.g., FIG. 16 ) andfurther forms a peripheral structure 1810 in the peripheral opening 1804(see, e.g., FIG. 18A). The peripheral structure 1810 comprises aperipheral plug 1812 and a peripheral barrier 1814 cupping an undersideof the peripheral plug 1812. The peripheral structure 1810 may, forexample, be a test line, a dummy structure, or some other suitablestructure.

While FIGS. 9-16, 17A, 17B, and 18A-18C are described with reference tovarious embodiments of a method, it will be appreciated that thestructures shown in FIGS. 9-16, 17A, 17B, and 18A-18C are not limited tothe method but rather may stand alone separate of the method. WhileFIGS. 9-16, 17A, 17B, and 18A-18C are described as a series of acts, itwill be appreciated that the order of the acts may be altered in otherembodiments. While FIGS. 9-16, 17A, 17B, and 18A-18C illustrate anddescribe as a specific set of acts, some acts that are illustratedand/or described may be omitted in other embodiments. Further, acts thatare not illustrated and/or described may be included in otherembodiments.

For example, embodiments of the method illustrated by FIGS. 9-16, 17A,and 17B may be modified to form the GC structure 102 (see, e.g., FIG.17B) and the second AR contact 106 b (see, e.g., FIG. 17B) as theircounterparts are in FIG. 1C or 1D. In some embodiments in which themethod is modified for FIG. 1C, the second AR contact 106 b is notformed at FIGS. 11 and 12 . Instead, a fifth etch is performed betweenFIGS. 16 and 17A to form an AR opening. Further, the method proceedsaccording to the acts at FIGS. 17A and 17B to form the second AR contact106 b in the AR opening. In some embodiments in which the method ismodified for FIG. 1D, the same process used for FIG. 1C is employedexcept that the barrier layer 1702 is omitted at FIG. 17A.

With reference to FIG. 19 , a block diagram 1900 of some embodiments ofthe method of FIGS. 9-16, 17A, 17B, and 18A-18C is provided.

At 1902, a semiconductor device is formed overlying a substrate andcovered by a first ILD layer, wherein the substrate at least partiallydefines an active region of the semiconductor device. See, for example,FIGS. 9 and 10 .

At 1904, an active region (AR) contact is formed extending through thefirst ILD layer to a source/drain region of the semiconductor device ata location neighboring a gate electrode of the semiconductor device.See, for example, FIGS. 11 and 12 . In alternative embodiments, the ARcontact extends to a body contact region of the semiconductor device orto some other location at the active region of the semiconductor device.

At 1906, an etch stop layer is deposited over the first ILD layer. See,for example, FIG. 13 .

At 1908, a second ILD layer is deposited over the etch stop layer. See,for example, FIG. 13 .

At 1910, a first etch is performed into the first and second ILD layersto form a via opening extending to the gate electrode. See, for example,FIG. 14 .

At 1912, a second etch is performed into the second ILD layer to form acontact opening overlying the AR contact and overlapping with the viaopening, wherein the second etch stops on the etch stop layer. See, forexample, FIG. 15 .

At 1914, a third etch is performed into the etch stop layer to extendthe contact opening to the AR contact and to slant a bottom of thecontact opening downward from the AR contact to the via opening. See,for example, FIG. 16 .

At 1916, a plug layer is deposited in the contact and via openings. See,for example, FIG. 17A or FIG. 18A.

At 1918, a planarization is performed into the plug layer and the secondILD layer to form a GC structure overlying and electrically coupling thegate electrode to the AR contact. See, for example, FIG. 17B or FIG.18C. The GC structure defines a gate contact and a gate via separatingthe gate contact from the gate electrode. Because the bottom of thecontact opening is slanted, an aspect ratio of the via opening is low.This reduces the likelihood or otherwise prevents seams and/or voidsfrom forming in the plug layer during deposition. Such seams and/orvoids would increase a resistance from the gate contact to the gateelectrode, which increases power consumption and potentially shiftsoperating parameters out of specification. Hence, slanting the bottom ofthe contact opening may improve yields and/or reduce power consumption.

At 1920, a back-end-of-line (BEOL) region is formed overlying the GCstructure. Non-limiting examples of such a BEOL region may be foundthrough reference to the BEOL region 402 in FIGS. 4A and 4B.

While the block diagram 1900 of FIG. 19 is illustrated and describedherein as a series of acts or events, it will be appreciated that theillustrated ordering of such acts or events is not to be interpreted ina limiting sense. For example, some acts may occur in different ordersand/or concurrently with other acts or events apart from thoseillustrated and/or described herein. Further, not all illustrated actsmay be required to implement one or more aspects or embodiments of thedescription herein, and one or more of the acts depicted herein may becarried out in one or more separate acts and/or phases.

In some embodiments, the present disclosure provides an IC comprising: asubstrate; a source/drain region overlying and inset into a top of thesubstrate; a gate electrode bordering the source/drain region over thesubstrate; a first level contact overlying and electrically coupled tothe source/drain region; a second level contact overlying the firstlevel contact and the gate electrode; and a gate via extending from thesecond level contact to the gate electrode, wherein a bottom surface ofthe second level contact slants downward from the first level contact tothe gate via. In some embodiments, the IC further comprises a metal plugand a metal barrier both defining the second level contact and the gatevia, wherein the metal barrier cups an underside of the metal plug andseparates the metal plug from the first level contact. In someembodiments, the IC further comprises: a first ILD layer over thesubstrate; a second ILD layer over the first ILD layer; and a etch stoplayer between and directly contacting the first and second ILD layersrespectively at a lower dielectric interface and an upper dielectricinterface, wherein the first and second level contacts directly contactat an inter-contact interface that is recessed relative to the lowerdielectric interface. In some embodiments, the IC further comprises afirst plug defining both the second level contact and the gate via andconsisting essentially of a single material, wherein the first levelcontact comprises a second plug and a diffusion barrier wrapping arounda bottom of the second plug, and wherein the first plug overlies anddirectly contacts a top surface of the diffusion barrier and a topsurface of the second plug. In some embodiments, the bottom surface ofthe second level contact slants downward from the first level contact tothe gate via in a first direction, wherein the second level contact islaterally elongated in the first direction, and wherein the first levelcontact is laterally elongated in a second direction transverse to thefirst direction. In some embodiments, the bottom surface of the secondlevel contact is at an angle of about 30-70 degrees relative to asidewall of the gate via. In some embodiments, a top surface of thesecond level contact is completely spaced from vias and wires over thesecond level contact.

In some embodiments, the present disclosure provides another ICcomprising: a substrate; a device overlying the substrate and comprisinga gate electrode, wherein the substrate at least partially defines an ARof the device; an AR contact extending along a sidewall of the gateelectrode from the AR to a top surface of the AR contact that iselevated above a top surface of the gate electrode; and a GC structureoverlying the AR contact and the gate electrode, wherein the GCstructure extends from the top surface of the gate electrode to the topsurface of the AR contact, wherein the GC structure defines a gate viaextending to the top surface of the gate electrode and spaced from theAR contact, and wherein the GC structure has a width increasingcontinuously from a top of the gate via to the top surface of the ARcontact. In some embodiments, the device comprises a source/drain regionbordering the gate electrode in the AR, wherein the AR contact extendsfrom the source/drain region to the top surface of the AR contact. Insome embodiments, the width of the GC structure increases from the topsurface of the gate electrode to the top of the gate via at a firstrate, wherein the width of the GC structure increases from the top ofthe gate via to the top surface of the AR contact at a second rategreater than the first rate. In some embodiments, a bottom surface ofthe GC structure is angled upward from a first sidewall of the gate viato a second sidewall of the AR contact. In some embodiments, the ICfurther comprises: an ILD layer underlying the GC structure and directlycontacting a bottom surface of the GC structure; and an etch stop layeroverlying and directly contacting the ILD layer, wherein the etch stoplayer laterally contacts the GC structure and is spaced from the ARcontact. In some embodiments, a top surface of the GC structure has afirst material across a majority of the top surface, wherein a bottomsurface of the GC structure directly contacts the AR contact at aninterface, and wherein the bottom surface of the GC structure has thefirst material at the interface. In some embodiments, the GC structurecomprises: a metal plug; and a metal liner layer on sidewalls of themetal plug and on a bottom surface of the metal plug, wherein the metalliner layer separates the metal plug from the AR contact and the gateelectrode.

In some embodiments, the present disclosure provides a method forforming an IC, the method comprising: forming an AR contact extendingthrough a first ILD layer to an AR of a semiconductor device; depositingan etch stop layer (ESL) and a second ILD layer covering the first ILDlayer and the AR contact, wherein the ESL is between the first andsecond ILD layers; performing a first etch into the ESL and the firstand second ILD layers to form a first opening exposing a gate electrodeof the semiconductor device; performing a second etch that is into thesecond ILD layer, and that stops on the ESL, to form a second openingoverlying the AR contact and overlapping with the first opening;performing a third etch into the ESL through the second opening toexpose the AR contact, wherein the third etch slants a bottom of thesecond opening downward from the AR contact to the first opening; andforming a GC structure filling the first and second openings andelectrically coupling the gate electrode to the AR contact. In someembodiments, the method further comprises performing a cleaning processbetween the performing of the third etch and the forming of the GCstructure, wherein the cleaning process further slants the bottom of thesecond opening downward from the AR contact to the first opening. Insome embodiments, the performing of the third etch comprises: formingplasma from a mixture of hydrogen gas and tetrafluoromethane gas; andapplying the plasma to the ESL. In some embodiments, the hydrogen gashas a first flow rate during the third etch, wherein thetetrafluoromethane gas has a second flow rate during the third etch, andwherein the first flow rate is about 10 times greater than the secondflow rate. In some embodiments, the forming of the GC structurecomprises: depositing a barrier layer lining and partially filling thefirst and second openings; depositing a plug layer filling a remainderof the first and second openings over the barrier layer; and performinga planarization into the barrier layer and the plug layer until topsurfaces respectively of the barrier layer and the plug layer are abouteven with a top surface of the second ILD layer. In some embodiments,the forming of the GC structure comprises: selectively growing a pluglayer filling the first and second openings from seed material of thegate electrode and seed material of the AR contact, wherein the pluglayer directly contacts sidewalls of the second ILD layer in the firstand second openings; and performing a planarization into the plug layerto level a top surface of the plug layer with a top surface of thesecond ILD layer.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

What is claimed is:
 1. A method for forming an integrated circuit (IC)comprising: forming an active region (AR) contact extending through afirst interlayer dielectric (ILD) layer to an AR of a semiconductordevice; depositing an etch stop layer (ESL) and a second ILD layercovering the first ILD layer and the AR contact, wherein the ESL isbetween the first and second ILD layers; performing a first etch intothe ESL and the first and second ILD layers to form a first openingexposing a gate electrode of the semiconductor device; performing asecond etch that is into the second ILD layer, and that stops on theESL, to form a second opening overlying the AR contact and overlappingwith the first opening; performing a third etch into the ESL through thesecond opening to expose the AR contact, wherein the third etch slants abottom of the second opening downward from the AR contact to the firstopening; and forming a gate-to-contact (GC) structure filling the firstand second openings and electrically coupling the gate electrode to theAR contact.
 2. The method according to claim 1, further comprising:performing a cleaning process between the performing of the third etchand the forming of the GC structure, wherein the cleaning processfurther slants the bottom of the second opening downward from the ARcontact to the first opening.
 3. The method according to claim 1,wherein the performing of the third etch comprises: forming plasma froma mixture of hydrogen gas and tetrafluoromethane gas; and applying theplasma to the ESL.
 4. The method according to claim 3, wherein thehydrogen gas has a first flow rate during the third etch, wherein thetetrafluoromethane gas has a second flow rate during the third etch, andwherein the first flow rate is about 10 times greater than the secondflow rate.
 5. The method according to claim 1, wherein the forming ofthe GC structure comprises: depositing a barrier layer lining andpartially filling the first and second openings; depositing a plug layerfilling a remainder of the first and second openings over the barrierlayer; and performing a planarization into the barrier layer and theplug layer until top surfaces respectively of the barrier layer and theplug layer are about even with a top surface of the second ILD layer. 6.The method according to claim 1, wherein the forming of the GC structurecomprises: selectively growing a plug layer filling the first and secondopenings from seed material of the gate electrode and seed material ofthe AR contact, wherein the plug layer directly contacts sidewalls ofthe second ILD layer in the first and second openings; and performing aplanarization into the plug layer to level a top surface of the pluglayer with a top surface of the second ILD layer.
 7. The methodaccording to claim 1, wherein the third etch extends into the first ILDlayer to a depth less than about 10 nanometers on an opposite side ofthe AR contact as the second opening.
 8. A method for forming anintegrated circuit (IC) comprising: forming a gate electrode overlying asubstrate; forming a source/drain region inset into the substrate andbordering to the gate electrode; forming a conductive contact overlyingthe source/drain region; depositing a dielectric film covering theconductive contact and the gate electrode; patterning the dielectricfilm to form an opening that overlies the conductive contact and thegate electrode, exposes the gate electrode, and is spaced from theconductive contact; after the patterning, performing an etch into thedielectric film to extend the opening to the conductive contact; andforming a conductive structure filling the opening, wherein theconductive structure extends from the conductive contact to the gateelectrode.
 9. The method according to claim 8, wherein the dielectricfilm comprises an etch stop layer (ESL) and an interlayer dielectric(ILD) layer overlying the ESL, wherein the opening is inset into the ESLand the ILD layer, and is spaced from the conductive contact, uponcompletion of the patterning.
 10. The method according to claim 8,wherein the patterning comprises: performing a second etch and a thirdetch to respectively form a vertical segment of the opening and ahorizontal segment of the opening, wherein the horizontal segmentoverlies the conductive contact and the gate electrode, and wherein thevertical segment extends from the horizontal segment to the gateelectrode.
 11. The method according to claim 8, wherein the openingshares a common depth at a first location directly over the conductivecontact and a second location directly over the gate electrode beforethe etch, and wherein the opening has a greater depth at the secondlocation than at the first location upon completion of the etch.
 12. Themethod according to claim 8, wherein a top surface of the conductivecontact has a planar profile before the etch, and wherein the topsurface of the conductive contact has a curved profile upon completionof the etch.
 13. The method according to claim 8, further comprising:forming a second source/drain region inset into the substrate andbordering to the gate electrode; and forming a second conductive contactoverlying the second source/drain region; wherein a top surface of theconductive contact is level with a top surface of the second conductivecontact before the etch, and wherein the top surface of the conductivecontact is recessed relative to the top surface of the second conductivecontact upon completion of the etch.
 14. The method according to claim8, wherein the conductive contact is level with the gate electrode andhas a height greater than that of the gate electrode.
 15. A method forforming an integrated circuit (IC) comprising: forming a gate electrodeoverlying a substrate; depositing a first dielectric layer covering thegate electrode; forming a conductive plug extending through the firstdielectric layer and bordering the gate electrode, wherein theconductive plug has a bottom surface recessed relative to a top surfaceof the gate electrode; depositing a second dielectric layer covering theconductive plug and the gate electrode; patterning the first and seconddielectric layers to form an opening overlying and exposing the gateelectrode, wherein the first dielectric layer has a top surface portionthat is between the conductive plug and the opening and that extendssubstantially in parallel with a top surface of the conductive plug;performing an etch into the first and second dielectric layers to slantthe top surface portion of the first dielectric layer downward away fromthe conductive plug; and filling the opening with conductive material toelectrically couple the conductive plug to the gate electrode.
 16. Themethod according to claim 15, wherein a portion of the opening overliesthe top surface portion upon completion of the patterning.
 17. Themethod according to claim 15, wherein the conductive plug and the gateelectrode are laterally spaced from each other in a first direction, andwherein a dimension of the gate electrode laterally in a seconddirection orthogonal to the first direction is greater than that of theopening.
 18. The method according to claim 15, further comprising:depositing an etch stop layer (ESL) covering the first dielectric layer,wherein the ESL directly contacts the top surface portion, and whereinthe second dielectric layer covers the ESL.
 19. The method according toclaim 15, wherein the conductive material directly contacts the topsurface portion of the first dielectric layer, the top surface of theconductive plug, and the top surface of the gate electrode.
 20. Themethod according to claim 15, wherein the filling comprises growing theconductive material selectively outward from the top surface of the gateelectrode and the top surface of the conductive plug.